Brooks SLA5840, Revision B Návod na používanie

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Brooks

®

Model SLA5840

Brooks

®

Digital Remote Transducer

Pressure Controller/Flowmeter

Model SLA5840

With RS485 Communications

Model SLA5840

With Profibus

®

Communications

Model SLA5840

With DeviceNet

®

Communications

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016Brooks

®

Model SLA5840

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 97/23/EC.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2004/108/EC).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Brooks

®

Model SLA5840

Dear Customer,

We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their

gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for

various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,

analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover

of this manual or visit www.BrooksInstrument.com

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016Brooks

®

Model SLA5840

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Brooks

®

Model SLA5840

Contents

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Paragraph Page

Number Number

Section 1 Introduction

1-1 Scope .........................................................................................................................................1-1

1-2 Purpose......................................................................................................................................1-1

1-3 Description .................................................................................................................................1-1

1-4 Specifications .............................................................................................................................1-2

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ...............................................................................................2-1

2-4 Return Shipment ........................................................................................................................2-2

2-5 Removal from Storage ...............................................................................................................2-2

2-6 Gas Connections........................................................................................................................2-2

2-7 Installation ..................................................................................................................................2-3

2-8 In-Line Filter ...............................................................................................................................2-4

2-9 Electrical Interface......................................................................................................................2-4

2-10 Operation Check Procedure.......................................................................................................2-7

Section 3 Operation

3-1 Overview ....................................................................................................................................3-1

3-2 Theory of Operation for RT ........................................................................................................3-1

3-3 Features .....................................................................................................................................3-2

3-4 Analog I/O Mode of Operation....................................................................................................3-4

3-5 Communications Features .........................................................................................................3-6

3-5-1 Analog/RS485 Communications Features .................................................................................3-6

3-5-2 Profibus Communications Features ...........................................................................................3-6

3-5-3 DeviceNet Communications Features........................................................................................3-7

Section 4 Maintenance & Troubleshooting

4-1 Overview ....................................................................................................................................4-1

4-2 Troubleshooting..........................................................................................................................4-1

4-3 Gas Conversion Factors ............................................................................................................4-4

4-4 Restrictor Sizing .........................................................................................................................4-8

ii

Brooks

®

Model SLA5840

Contents Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Section A Essential Instructions............................................................................................................ A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

Figures

Figure Page

Number Number

1-1 SLA5840 Analog/RS485 Connections and Pinouts....................................................................1-6

1-2 SLA5840 Profibus Connections and Pinouts .............................................................................1-7

1-3 SLA5840 DeviceNet Connections and Pinouts ..........................................................................1-8

1-4 Model SLA5840, Thru-Flow, RS485 ...........................................................................................1-9

1-5 Model SLA5840, Thru-Flow, Profibus.........................................................................................1-9

1-6 Model SLA5840, Thru-Flow, DeviceNet ....................................................................................1-10

2-1 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Options .......................................2-5

2-2 Common Electrical Hookups Voltage I/O Version ......................................................................2-5

2-3 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)......2-6

2-4 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) .............2-6

3-1 Model SLA5840 System Block Diagram ....................................................................................3-1

3-2 Model SLA5840 Downstream and Upstream Applications .........................................................3-2

3-3 Typical Application of Downstream Controller ............................................................................3-3

3-4 Typical Application of Upstream Controller.................................................................................3-3

3-5 Externally Accessible Zero for all Meters/Controllers .................................................................3-4

4-1 Bench Troubleshooting Circuit ...................................................................................................4-3

Tables

Table Page

Number Number

1-1 SLA5840 Flow Ranges and Pressure Ratings ...........................................................................1-3

1-2 SLA5840 Specifications .............................................................................................................1-3

1-3 SLA5840 Series Communication Protocols ...............................................................................1-4

1-4 SLA58xx Series Certifications....................................................................................................1-5

2-1 Recommended Filter Size..........................................................................................................2-4

4-1 Conversion Factors (Nitrogen Base)..........................................................................................4-5

4-2 Standard Restrictors...................................................................................................................4-9

Brooks

®

Model SLA5840

1-1

Section 1 IntroductionInstallation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

1-1 Scope

Thank you for purchasing a Brooks Instrument Remote Transducer

Pressure Controller/Flowmeter Product. This manual, X-PR-SLA5840-

Series-RevB-RT-eng is an installation and operation manual for your

instrument.

If you have purchased a Brooks

®

Digital Mass Flow Product with

DeviceNet

TM

or Profibus

®

Communications, a separate Instruction Manual

shall also be provided as part of the operating documentation.

1-2 Purpose

The Brooks Digital Products are mass flow measurement devices

designed for accurately measuring and controlling both pressure and the

flows of gases. This instruction manual is intended to provide the user with

all the information necessary to install, operate and maintain the Brooks

®

RT.

This manual is organized into the following sections.

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance & Troubleshooting

Section A Essential Instructions

Back Cover Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting

to operate or repair these Brooks Digital products.

1-3 Description

The Brooks

®

Model SLA5840 Pressure Controller/Flowmeter is designed to

control pressure while also measuring flow rate. The Model SLA5840

receives a remote pressure transducer signal, and using adjustable

integral PID control electronics and control valve, will maintain a desired

set pressure. The Model SLA5840 can also be configured as a mass flow

controller for calibration or test purposes.

Brooks now offers control interface with DeviceNet and Profibus, two high-

speed digital communication networks. Other network protocols are in

development. Talk to your Brooks representative about your specific needs.

The MFC's microprocessor uses a multi-point calibration curve, to deal

with residual sensor non-linearity, yielding a highly accurate process signal.

The microprocessor then executes Brooks’ proprietary Adaptive Valve

Control algorithm to rapidly adjust the valve actuation to match setpoint.

Process data and commands may be wired using either traditional analog

connections or digital communications networks, the measurement and

control performance is the same!

The SLA5800 family of products takes advantage of modular design in

both mechanical and electrical construction. This modularity allows for

1-2

Brooks

®

Model SLA5840

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

simplified customer ordering and factory configuration, enabling Brooks to

more easily meet the ever changing needs of our global customers.

Brooks' production flexibility translates into reduced lead times for our

customers. This flexibility allows products using both traditional analog

connections or leading edge network communications protocols.

The SLA5800 series of controllers can directly replace existing analog

products bringing with them greatly improved accuracy. Analog and digital

applications will see settling time improvements with an insensitivity to

varying process conditions, due to Brooks' proprietary Adaptive Valve Control

algorithm.

1-4 Specification

Brooks

®

Model SLA5840

1-3

Section 1 IntroductionInstallation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Table 1-1 SLA5840 Flow Ranges and Pressure Ratings

Table 1-2 SLA5840 Series Specifications

Pressure ControllerPressure Controller

Pressure Controller

Pressure ControllerPressure Controller

Pressure Controller

Flow RangesFlow Ranges

Flow Ranges

MinimumMinimum

Minimum

MaximumMaximum

Maximum

Pressure EquipmentPressure Equipment

Pressure Equipment

ModelModel

Model

Control ModeControl Mode

Control Mode

N2 Eq. Ratings (lpm) N2 Eq. Ratings (lpm)

N2 Eq. Ratings (lpm)

Full Scale PressureFull Scale Pressure

Full Scale Pressure

Full Scale PressureFull Scale Pressure

Full Scale Pressure

Directive (PED)Directive (PED)

Directive (PED)

Min. F.S.Min. F.S.

Min. F.S.

Max. F.S.Max. F.S.

Max. F.S.

StandardStandard

Standard

StandardStandard

Standard

Module H CategoryModule H Category

Module H Category

SLA5840 Remote Transducer 0.003 50 10 psi 1500 psia/103 bara Sound Engineering

Upstream or Downstream 0.1 10 1500 psi 4500 psia/310 bara Practices (SEP)

*Alarm modes are dependent on the communications interface. These are described in the corresponding digital communication interface manual.

PerformancePerformance

Performance

Pressure AccuracyPressure Accuracy

Pressure Accuracy Dependent on Remote Pressure Transducer

(Including Linearity and Hysteresis)(Including Linearity and Hysteresis)

(Including Linearity and Hysteresis)

Flow Accuracy (N2 equivalent)Flow Accuracy (N2 equivalent)

Flow Accuracy (N2 equivalent) ±0.9% of S.P. (20-100% F.S.)

+0.18% of F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

Control RangeControl Range

Control Range 20:1 Typical - Application specific

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility 0.20% S.P.

LinearityLinearity

Linearity Included in accuracy

Response Time (Response Time (

Response Time (

Settling time withinSettling time within

Settling time within <1 second

±2% F.S. for 0-100% command step)±2% F.S. for 0-100% command step)

±2% F.S. for 0-100% command step)

Zero StabilityZero Stability

Zero Stability Dependent on Remote Pressure Transducer

Temperature CoefficientTemperature Coefficient

Temperature Coefficient Dependent on Remote Pressure Transducer

Pressure CoefficientPressure Coefficient

Pressure Coefficient ±0.03% per psi (0-200 psi N2)

(Flow Measurement Only)(Flow Measurement Only)

(Flow Measurement Only)

Attitude SensitivityAttitude Sensitivity

Attitude Sensitivity The accuracy of the Pressure Sensor is not attitude dependent

RatingsRatings

Ratings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range -14 to 65

o

C (7 to 149

o

F)

Transducer Pressure RatingsTransducer Pressure Ratings

Transducer Pressure Ratings Dependent on Remote Pressure Transducer

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10

-9

atm. cc/sec He

MechanicalMechanical

Mechanical

Valve TypeValve Type

Valve Type Normally Closed, Normally Open

Primary Wetted MaterialsPrimary Wetted Materials

Primary Wetted Materials 316L Stainless Steel, High Alloy Stainless Steel, Viton

®

fluoroelastomers.

Optional Buna-N, Kalrez

®

, Teflon

®

/Kalrez

®

, and EPDM

DiagnosticsDiagnostics

Diagnostics

Status LightsStatus Lights

Status Lights MFC Health, Network Status

Alarms*Alarms*

Alarms*

Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service PortDiagnostic/Service Port

Diagnostic/Service Port

RS485 via 2.5 mm jack (Located under the top cover in SLAMf version)

SLA5840SLA5840

SLA5840

1-4

Brooks

®

Model SLA5840

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Table 1-3 SLA5840 Series Communication Protocols

Communication ProtocolCommunication Protocol

Communication Protocol

RS485RS485

RS485

ProfibusProfibus

Profibus

®®

®

DeviceNetDeviceNet

DeviceNet

®®

®

******

***

Electrical Connection (SLA58xx)Electrical Connection (SLA58xx)

Electrical Connection (SLA58xx) 1 x 15-pin Male Sub-D, (A) 1 x 15-pin Male Sub-D 1 M12 with threaded

1 x 9-pin Female Sub-D coupling nut (B)

Electrical Connection (SLAMf)Electrical Connection (SLAMf)

Electrical Connection (SLAMf) PG11 Cable Gland, 1/2” NPT (F) Conduit, M20 x 1.5 Conduit N/A

Analog I/OAnalog I/O

Analog I/O 0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA N/A

Power Max./PurgePower Max./Purge

Power Max./Purge From +13.5 Vdc to +27 Vdc From +11 Vdc to +25 Vdc

Power Requirements Watts, Max.Power Requirements Watts, Max.

Power Requirements Watts, Max. Valve Orifice > 0.032”: 8.7 Watts Valve Orifice > 0.032”: 10 Watts

Valve Orifice ≤ 0.032”: 5.2 Watts Valve Orifice ≤ 0.032”: 7 Watts

Without Valve: 2 Watts Without Valve: 4 Watts

Voltage Set Point Input SpecificationsVoltage Set Point Input Specifications

Voltage Set Point Input Specifications

Nominal RangeNominal Range

Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A

Full RangeFull Range

Full Range (-0.5)-11 Vdc N/A

Absolute Max.Absolute Max.

Absolute Max. 18 V (without damage) N/A

Input ImpedenceInput Impedence

Input Impedence >990 kOhms N/A

Current Set Point Input SpecificationsCurrent Set Point Input Specifications

Current Set Point Input Specifications

Nominal RangeNominal Range

Nominal Range 4-20 mA or 0-20 mA N/A

Full RangeFull Range

Full Range 0-22 mA N/A

Absolute Max.Absolute Max.

Absolute Max. 24 mA (without damage) N/A

Input ImpedenceInput Impedence

Input Impedence 100 Ohms N/A

Flow Output (Voltage) SpecificationsFlow Output (Voltage) Specifications

Flow Output (Voltage) Specifications

Nominal RangeNominal Range

Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A

Full RangeFull Range

Full Range (-1)-11 Vdc N/A

Min Load ResistanceMin Load Resistance

Min Load Resistance 2 kOhms N/A

Flow Output (Current) SpecificationsFlow Output (Current) Specifications

Flow Output (Current) Specifications

Nominal RangeNominal Range

Nominal Range 0-20 mA or 4-20 mA N/A

Full RangeFull Range

Full Range 0-22 mA N/A

Max. LoadMax. Load

Max. Load 380 Ohms N/A

Analog I/O Alarm Ouput*Analog I/O Alarm Ouput*

Analog I/O Alarm Ouput*

TypeType

Type Open Collector N/A

Max. Closed (On) CurrentMax. Closed (On) Current

Max. Closed (On) Current 25 mA N/A

Max. Open (Off) LeakageMax. Open (Off) Leakage

Max. Open (Off) Leakage 1μA N/A

Max. Open (Off) VoltageMax. Open (Off) Voltage

Max. Open (Off) Voltage 30 Vdc N/A

Analog I/O Valve Override Signal Specifications**Analog I/O Valve Override Signal Specifications**

Analog I/O Valve Override Signal Specifications**

Floating/UnconnectedFloating/Unconnected

Floating/Unconnected Instrument controls valve to command set point N/A

VOR < 0.3 VdcVOR < 0.3 Vdc

VOR < 0.3 Vdc Valve Closed N/A

0.3 Vdc < VOR < 4.8 Vdc0.3 Vdc < VOR < 4.8 Vdc

0.3 Vdc < VOR < 4.8 Vdc Undefined N/A

VOR > 4.8 VdcVOR > 4.8 Vdc

VOR > 4.8 Vdc Valve Open N/A

Input ImpedenceInput Impedence

Input Impedence

Input Impedence 60 kOhms N/A

Absolute Max. InputAbsolute Max. Input

Absolute Max. Input (-25 Vdc) < VOR < 25 Vdc (without damage) N/A

*The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active.

The Alarm Output may be set to indicate any one of various alarm conditions.

** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the

valve based upon the measured reading as shown in this section.

*** Available on SLA5810/20/40 only.

Brooks

®

Model SLA5840

1-5

Section 1 IntroductionInstallation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Table 1-4 SLA58XX Series Certifications

Mark Agency Certification

Applicable

Standard Details

UL

(Recogonized)

Class I, Div 2, Group A, B, C, D

Class I, Zone 2, IIC T4

Class II, Zone 22

UL & CSA

Standards E73889 Vol 3, Sec 4

ATEX

II 3 G Ex nA IIC T4 Gc EN60079-0:2012

EN 60079-15:2010 KEMA 04ATEX 1118X

IECEx

II 3 G Ex nA IIC T4 Gc IEC 60079-0:2011

IEC 60079-15:2010 IECEx DEK 14.0072X

KOSHA Ex nA IIC T4

15-AV4BO-0641

15-AV4BO-0640

CE

EMC Directive 2014/30/EU

Directive 2011/65/EU

EN:61326-1:2013 EMC

RoHS

*ATEX/IECEx Special Conditions for safe use:

1. The module shall be installed in a suitable enclosure providing a degree of protection of

at least IP54 according to EN 60529 / IEC 60529, taking into account the environmental

conditions under which the equipment will be used.

2. When the temperature under rated condition exceeds 70 °C at the cable or conduit entry

point, or 80 °C at the branching point of the conductors, the temperature specification of

the selected cable shall be in compliance with the actual measured temperature values.

3. Provisions shall be made to prevent the rated voltage from being exceeded by transient

disturbances of more than 40%.

4. The equipment shall only be used in an area of not more than pollution degree 2, as

defined in IEC 60664-1.

1-6

Brooks

®

Model SLA5840

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Figure 1-1 SLA5840 Analog/RS485 Connections and Pinouts

RS485 Communications

The Brooks Digital Series is equipped with RS485 communication capability. Refer to Figure 1-2 (Analog I/O pin

connections), that enables the device to communicate via a personal computer for process control.

Baud rate selections for the Brooks Digital Series related to RS485 are: 1200, 2400, 4800, 9600, 19200 and 38400

baud and can be selected via the Brooks Expert Support Tool (BEST).

The RS485 is essentially a multidrop connection. It allows a maximum of 32 devices to be connected to a

computer system. IBM-compatible PC's are not equipped with RS485 ports as standard. An RS232/USB to RS485

converter or RS485 interface board is therefore required to connect an RS485 network to a standard PC. The

RS485 bus, a daisy chain network, meaning that the wires are connected at the units.

Note: Aux Input is used for Remote Transducer Pressure Controllers only.

Brooks

®

Model SLA5840

1-7

Section 1 IntroductionInstallation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Figure 1-2 SLA5840 Profibus Connections and Pinouts

Profibus

®

Communications

The Brooks SLA5840 is now equipped to support the Profibus communication protocol. Profibus is a fieldbus-

based automation standard of Profibus and Profinet International (PI). Via a single bus cable, Profibus links

controller or control systems with decentralized field devices (sensors and actuators) on the field level and also

enables consistent data exchange with higher ranking communication systems. A 9-pin sub-D connector is

included on every device and is galvanic isolated from the main electronics as defined by the EN 50170 Profibus

standard to allow easy network connection separate from the main connector. The main 15-pin sub-D connector

or termination board is still needed for the power supply, but also allows for the standard analog I/O signals,

analog valve override, and (open-collector) alarm signaling to be used separate from the network connection.

The communication electronics allows for automatic baud rate detection ranging from 9600 baud to 12 Mbaud,

thus making the need for any hardware baud rate selection methods not required. For selecting the device

address, which must be unique on the network, two rotary switches are provided. This allows a user to easily

select any address number ranging from 0 to 126. This can provide fast device replacement without complex

network configurations. The Profibus-DP piggyback board is equipped with a zero command pushbutton, allowing

the user to give a manual command to the device to (re)balance the flow sensor electronics. This command can

also be issued through the protocol.

The Profibus-DP communication option supports the following message types:

• Cyclic data exchange (Write/Read data).

• Read inputs (e.g. status, flow, temperature, totalizer, etc.).

• Read outputs (e.g. commands, setpoint).

• Global control commands (e.g. fail safe, sync).

• Get configuration (i.e. read number of I/O bytes and composition).

• Read diagnostics information (i.e. get error and alarm status).

• Set parameters (i.e. select gas number, engineering units, I/O configuration

• Set parameters (i.e. select gas number, engineering units, I/O configuration etc.).

• Check configuration (i.e. check I/O composition).

Note: Aux Input is used for

Remote Transducer Pressure

Controllers only.

1-8

Brooks

®

Model SLA5840

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

DeviceNet

TM

Communications

The Brooks SLA5840 is also available with DeviceNet

TM

communication capability. DeviceNet is an open digital

protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices

available on this popular networking standard, and is a member of ODVA

TM

(Open DeviceNet Vendors Association),

the governing standard body for DeviceNet.

DeviceNet

is similar to the RS485 standard in that it is a multi-drop connection that allows a maximum of 64 devices to

be connected on the same network. Baud rate selections for DeviceNet

products are 125K, 250K and 500K and can

be selected via MAC ID switches mounted on the device.

The DeviceNet

communication link also provides access to many of the Brooks SLA Digital Series functions for

“control and monitor” operations, including:

• Accurate setpoint adjustment and flow output measurement (including units of measure selection)

• PID Settings (controller only)

• Valve Override (controller only)

• Calibration Gas Select

• Soft Start Control (controller only)

Figure 1-3 SLA5840 DeviceNet Connections and Pinouts

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

Brooks

®

Model SLA5840

1-9

Section 1 IntroductionInstallation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Figure 1-4 Model SLA5840, Thru-Flow, RS485

Figure 1-5 Model SLA5840, Thru-Flow, Profibus

1-10

Brooks

®

Model SLA5840

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

Figure 1-6 Model SLA5840, Thru-Flow, DeviceNet

2-1

Brooks

®

Model SLA5840

Section 2 Installation

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June 2016

2-1 General

This section provides installation instructions for the Brooks

®

SLA

Enhanced Remote Transducer Pressure Controller. Section 1, Figures 1-1

thru 1-6 show the dimensions and electrical connections.

2-2 Receipt of Equipment

When the instrument is received, the outside packing case should be

checked for damage incurred during shipment. If the packing case is

damaged, the local carrier should be notified at once regarding his liability.

A report should be submitted to your nearest Product Service Department.

Brooks Instrument

407 W. Vine Street

P.O. Box 903

Hatfield, PA 19440 USA

Toll Free (888) 554 FLOW (3569)

Tel (215) 362 3700

Fax (215) 362 3745

E-mail: BrooksAm@BrooksInstrument.com

www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku

6718 WX Ede, Netherlands Tokyo, 136-0073 Japan

P.O. Box 428 Tel +81 (0) 3 5633 7100

6710 BK Ede, Netherlands Fax +81 (0) 3 5633 7101

Tel +31 (0) 318 549 300 Email: BrooksAs@BrooksInstrument.com

Fax +31 (0) 318 549 309

E-mail: BrooksEu@BrooksInstrument.com

Remove the envelope containing the packing list. Carefully remove the

instrument from the packing case. Make sure spare parts are not

discarded with the packing materials. Inspect for damaged or missing

parts.

2-3 Recommended Storage Practice

If intermediate or long-term storage of equipment is required, it is

recommended that the equipment be stored in accordance with the

following:

a. Within the original shipping container.

b. Stored in a sheltered area, preferably a dry, temperature controlled room.

c. 15°C (32°F) minimum, 35°C (149°F) maximum.

d. Relative humidity 45% nominal, 60% maximum, 25% minimum.

e. Upon removal from storage a visual inspection should be conducted to

verify the condition of equipment is "as received".

2-2

Brooks

®

Model SLA5840

Section 2 Installation

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

2-4 Return Shipment

Prior to returning any instrument to the factory, obtain a Return Materials

Authorization Number (RMA#). This can be obtained from the Brooks

Instrument website: www.BrooksInstrument.com

Brooks Instrument

407 W. Vine Street

P.O. Box 903

Hatfield, PA 19440 USA

Toll Free (888) 554 FLOW (3569)

Tel (215) 362 3700

Fax (215) 362 3745

E-mail: BrooksAm@BrooksInstrument.com

www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku

6718 WX Ede, Netherlands Tokyo, 136-0073 Japan

P.O. Box 428 Tel +81 (0) 3 5633 7100

6710 BK Ede, Netherlands Fax +81 (0) 3 5633 7101

Tel +31 (0) 318 549 300 Email: BrooksAs@BrooksInstrument.com

Fax +31 (0) 318 549 309

E-mail: BrooksEu@BrooksInstrument.com

All flow instruments returned to Brooks requires completion of Form

RPR003-1, Brooks Instrument Decontamination Statement, along with a

Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument.

Failure to provide this information will delay processing by Brooks

personnel. Copies of these forms can be downloaded from the Brooks

website www.BrooksInstrument.com or are available from any Brooks

Instrument location listed above.

2-5 Removal from Storage

Upon removal from storage, a visual inspection should be conducted to

verify the condition of the equipment is “as received.” If the equipment has

been in storage in conditions in excess of those recommended

(See Section 2-3), the device should be subjected to a pneumatic pressure

test in accordance with applicable vessel codes.

2-6 Gas Connections

Prior to installation ensure all piping is clean and free from obstructions.

Install piping in such a manner that permits easy access to the instrument

if removal becomes necessary.

2-3

Brooks

®

Model SLA5840

Section 2 Installation

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June 2016

2-7 Installation

Recommended installation procedures:

a. The SLA Enhanced RT should be located in a clean, dry atmosphere

relatively free from shock and vibration.

b. Leave sufficient room for access to Self-zero function push-button.

c. Install in such a manner that permits easy removal if the instrument

requires servicing.

d. The SLA Enhanced RT can be installed in any position. However,

mounting in orientations other than the original factory calibration

(see calibration data sheet supplied with the instrument) can result in a

±0.5% maximum full scale shift always re-zero following orientation

change and warmup.

e. When installing a mass flow controller or meter with full scale flow rates

of 10 slpm or greater, be aware that sharp, abrupt angles in the system

piping directly upstream of the controller may cause a small shift in

accuracy. If possible, have at least ten pipe diameters of straight tubing

upstream of the mass flow controller or meter. This is not required for

meters with an integrated filter.

2-4

Brooks

®

Model SLA5840

Section 2 Installation

Installation and Operation Manual

X-PR-SLA5840-Series-RevB-RT-eng

Part Number: 541B201AAG

June, 2016

2-8 In-Line Filter (See Table 2-1)

It is recommended that an in-line filter be installed upstream from the mass

flow controller or meter to prevent the possibility of any foreign material

entering the flow sensor or control valve. The filtering element should be

replaced periodically or ultrasonically cleaned.

2-9 Electrical Interface (Reference Figures 2-1 thru 2-4)

SLA Enhanced RT's are controlled using analog signals or digital control via

RS485, DeviceNet or Profibus. For an analog unit the minimum set of

connections which must be made to the pressure controller include: power

supply+ , supply common, setpoint, setpoint common, output signal and

output signal common. All signals are supplied via the 15-pin 'D' connector.

SLA Enhanced RT's electrical interface is designed to facilitate low-loss

and quiet signal connections. Separate returns (commons) are supplied for

the analog setpoint, analog flow signal, and the power supply. These

commons are electrically connected together on the PC board.

Voltage I/O Version

• Signal Common

• Signal Output

• +13.5 to +27 Vdc Supply

• Setpoint Input

• Setpoint Common

• Supply Common

For a DeviceNet unit, 11-25 Vdc power and communication I/O are

supplied via the standard 5-pin Circular Micro-Connector.

For a Profibus unit, the power and analog signals are via the 15-pin 'D'

connector. The Profibus communication signals are via the auxiliary 9-pin

'D' connector.

Refer to Figure 1-1 for analog/RS485 pin connections, Figure 1-2 for

Profibus pin connections and Figure 1-3 for DeviceNet pin connections.

Refer to Figures 2-2, 2-3 and 2-4 for typical electrical I/O configurations.

Models Maximum Flow Rate Recommended Filter

SLA5840 100 ccm 2 micron

SLA5840 500 ccm 5 micron

SLA5840 1 to 5 lpm 10 micron

SLA5840 10 to 100 lpm 40 micron

Table 2-1 Recommended Filter Size

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Brooks SLA5840, Revision B Návod na používanie

Brooks SLA5840, Revision B Návod na používanie

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