Brooks SLA5840, Revision B Návod na používanie

Typ
Návod na používanie
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Brooks
®
Model SLA5840
Brooks
®
Digital Remote Transducer
Pressure Controller/Flowmeter
Model SLA5840
Model SLA5840
With RS485 Communications
Model SLA5840
With Profibus
®
Communications
Model SLA5840
With DeviceNet
®
Communications
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016Brooks
®
Model SLA5840
ESD (Electrostatic Discharge)
CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed
during the removal, installation or other handling of internal circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,
removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before
installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components
that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these
devices. Damaged components, even though they appear to function properly, exhibit early failure.
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly
installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to
and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover
for local sales office contact information. Save this instruction manual for future reference.
WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed
this warning can result in serious personal injury and / or damage to the equipment.
If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
Follow all warnings, cautions and instructions marked on and supplied with the product.
WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can
result in serious personal injury and / or damage to the equipment.
Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.
Connect all products to the proper electrical and pressure sources.
Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet
and outlet connections. If no leaks are present, bring the system up to the operating pressure.
Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use
replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe
operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when
maintenance is being performed by qualified persons.
WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely
drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).
The Specifications Section of this manual contains instructions related to the PED directive.
Products described in this manual are in compliance with EN directive 97/23/EC.
All Brooks Instrument Flowmeters fall under fluid group 1.
Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic
Compatibility (EMC directive 2004/108/EC).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to an earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.
The shield should be terminated to an earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
European Pressure Equipment Directive (PED)
European Electromagnetic Compatibility (EMC)
Essential Instructions
Read before proceeding!
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Brooks
®
Model SLA5840
Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yours sincerely,
Brooks Instrument
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016Brooks
®
Model SLA5840
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
i
Brooks
®
Model SLA5840
Contents
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Paragraph Page
Number Number
Section 1 Introduction
1-1 Scope .........................................................................................................................................1-1
1-2 Purpose......................................................................................................................................1-1
1-3 Description .................................................................................................................................1-1
1-4 Specifications .............................................................................................................................1-2
Section 2 Installation
2-1 General ......................................................................................................................................2-1
2-2 Receipt of Equipment.................................................................................................................2-1
2-3 Recommended Storage Practice ...............................................................................................2-1
2-4 Return Shipment ........................................................................................................................2-2
2-5 Removal from Storage ...............................................................................................................2-2
2-6 Gas Connections........................................................................................................................2-2
2-7 Installation ..................................................................................................................................2-3
2-8 In-Line Filter ...............................................................................................................................2-4
2-9 Electrical Interface......................................................................................................................2-4
2-10 Operation Check Procedure.......................................................................................................2-7
Section 3 Operation
3-1 Overview ....................................................................................................................................3-1
3-2 Theory of Operation for RT ........................................................................................................3-1
3-3 Features .....................................................................................................................................3-2
3-4 Analog I/O Mode of Operation....................................................................................................3-4
3-5 Communications Features .........................................................................................................3-6
3-5-1 Analog/RS485 Communications Features .................................................................................3-6
3-5-2 Profibus Communications Features ...........................................................................................3-6
3-5-3 DeviceNet Communications Features........................................................................................3-7
Section 4 Maintenance & Troubleshooting
4-1 Overview ....................................................................................................................................4-1
4-2 Troubleshooting..........................................................................................................................4-1
4-3 Gas Conversion Factors ............................................................................................................4-4
4-4 Restrictor Sizing .........................................................................................................................4-8
ii
Brooks
®
Model SLA5840
Contents Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Section A Essential Instructions............................................................................................................ A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover
Figures
Figure Page
Number Number
1-1 SLA5840 Analog/RS485 Connections and Pinouts....................................................................1-6
1-2 SLA5840 Profibus Connections and Pinouts .............................................................................1-7
1-3 SLA5840 DeviceNet Connections and Pinouts ..........................................................................1-8
1-4 Model SLA5840, Thru-Flow, RS485 ...........................................................................................1-9
1-5 Model SLA5840, Thru-Flow, Profibus.........................................................................................1-9
1-6 Model SLA5840, Thru-Flow, DeviceNet ....................................................................................1-10
2-1 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Options .......................................2-5
2-2 Common Electrical Hookups Voltage I/O Version ......................................................................2-5
2-3 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)......2-6
2-4 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) .............2-6
3-1 Model SLA5840 System Block Diagram ....................................................................................3-1
3-2 Model SLA5840 Downstream and Upstream Applications .........................................................3-2
3-3 Typical Application of Downstream Controller ............................................................................3-3
3-4 Typical Application of Upstream Controller.................................................................................3-3
3-5 Externally Accessible Zero for all Meters/Controllers .................................................................3-4
4-1 Bench Troubleshooting Circuit ...................................................................................................4-3
Tables
Table Page
Number Number
1-1 SLA5840 Flow Ranges and Pressure Ratings ...........................................................................1-3
1-2 SLA5840 Specifications .............................................................................................................1-3
1-3 SLA5840 Series Communication Protocols ...............................................................................1-4
1-4 SLA58xx Series Certifications....................................................................................................1-5
2-1 Recommended Filter Size..........................................................................................................2-4
4-1 Conversion Factors (Nitrogen Base)..........................................................................................4-5
4-2 Standard Restrictors...................................................................................................................4-9
Brooks
®
Model SLA5840
1-1
Section 1 IntroductionInstallation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
1-1 Scope
Thank you for purchasing a Brooks Instrument Remote Transducer
Pressure Controller/Flowmeter Product. This manual, X-PR-SLA5840-
Series-RevB-RT-eng is an installation and operation manual for your
instrument.
If you have purchased a Brooks
®
Digital Mass Flow Product with
DeviceNet
TM
or Profibus
®
Communications, a separate Instruction Manual
shall also be provided as part of the operating documentation.
1-2 Purpose
The Brooks Digital Products are mass flow measurement devices
designed for accurately measuring and controlling both pressure and the
flows of gases. This instruction manual is intended to provide the user with
all the information necessary to install, operate and maintain the Brooks
®
RT.
This manual is organized into the following sections.
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance & Troubleshooting
Section A Essential Instructions
Back Cover Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these Brooks Digital products.
1-3 Description
The Brooks
®
Model SLA5840 Pressure Controller/Flowmeter is designed to
control pressure while also measuring flow rate. The Model SLA5840
receives a remote pressure transducer signal, and using adjustable
integral PID control electronics and control valve, will maintain a desired
set pressure. The Model SLA5840 can also be configured as a mass flow
controller for calibration or test purposes.
Brooks now offers control interface with DeviceNet and Profibus, two high-
speed digital communication networks. Other network protocols are in
development. Talk to your Brooks representative about your specific needs.
The MFC's microprocessor uses a multi-point calibration curve, to deal
with residual sensor non-linearity, yielding a highly accurate process signal.
The microprocessor then executes Brooks’ proprietary Adaptive Valve
Control algorithm to rapidly adjust the valve actuation to match setpoint.
Process data and commands may be wired using either traditional analog
connections or digital communications networks, the measurement and
control performance is the same!
The SLA5800 family of products takes advantage of modular design in
both mechanical and electrical construction. This modularity allows for
1-2
Brooks
®
Model SLA5840
Section 1 Introduction
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
simplified customer ordering and factory configuration, enabling Brooks to
more easily meet the ever changing needs of our global customers.
Brooks' production flexibility translates into reduced lead times for our
customers. This flexibility allows products using both traditional analog
connections or leading edge network communications protocols.
The SLA5800 series of controllers can directly replace existing analog
products bringing with them greatly improved accuracy. Analog and digital
applications will see settling time improvements with an insensitivity to
varying process conditions, due to Brooks' proprietary Adaptive Valve Control
algorithm.
1-4 Specification
Brooks
®
Model SLA5840
1-3
Section 1 IntroductionInstallation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Table 1-1 SLA5840 Flow Ranges and Pressure Ratings
Table 1-2 SLA5840 Series Specifications
Pressure ControllerPressure Controller
Pressure ControllerPressure Controller
Pressure Controller
Pressure ControllerPressure Controller
Pressure ControllerPressure Controller
Pressure Controller
Flow RangesFlow Ranges
Flow RangesFlow Ranges
Flow Ranges
MinimumMinimum
MinimumMinimum
Minimum
MaximumMaximum
MaximumMaximum
Maximum
Pressure EquipmentPressure Equipment
Pressure EquipmentPressure Equipment
Pressure Equipment
ModelModel
ModelModel
Model
Control ModeControl Mode
Control ModeControl Mode
Control Mode
N2 Eq. Ratings (lpm) N2 Eq. Ratings (lpm)
N2 Eq. Ratings (lpm) N2 Eq. Ratings (lpm)
N2 Eq. Ratings (lpm)
Full Scale PressureFull Scale Pressure
Full Scale PressureFull Scale Pressure
Full Scale Pressure
Full Scale PressureFull Scale Pressure
Full Scale PressureFull Scale Pressure
Full Scale Pressure
Directive (PED)Directive (PED)
Directive (PED)Directive (PED)
Directive (PED)
Min. F.S.Min. F.S.
Min. F.S.Min. F.S.
Min. F.S.
Max. F.S.Max. F.S.
Max. F.S.Max. F.S.
Max. F.S.
StandardStandard
StandardStandard
Standard
StandardStandard
StandardStandard
Standard
Module H CategoryModule H Category
Module H CategoryModule H Category
Module H Category
SLA5840 Remote Transducer 0.003 50 10 psi 1500 psia/103 bara Sound Engineering
Upstream or Downstream 0.1 10 1500 psi 4500 psia/310 bara Practices (SEP)
*Alarm modes are dependent on the communications interface. These are described in the corresponding digital communication interface manual.
PerformancePerformance
PerformancePerformance
Performance
Pressure AccuracyPressure Accuracy
Pressure AccuracyPressure Accuracy
Pressure Accuracy Dependent on Remote Pressure Transducer
(Including Linearity and Hysteresis)(Including Linearity and Hysteresis)
(Including Linearity and Hysteresis)(Including Linearity and Hysteresis)
(Including Linearity and Hysteresis)
Flow Accuracy (N2 equivalent)Flow Accuracy (N2 equivalent)
Flow Accuracy (N2 equivalent)Flow Accuracy (N2 equivalent)
Flow Accuracy (N2 equivalent) ±0.9% of S.P. (20-100% F.S.)
+0.18% of F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)
Control RangeControl Range
Control RangeControl Range
Control Range 20:1 Typical - Application specific
Repeatability & ReproducibilityRepeatability & Reproducibility
Repeatability & ReproducibilityRepeatability & Reproducibility
Repeatability & Reproducibility 0.20% S.P.
LinearityLinearity
LinearityLinearity
Linearity Included in accuracy
Response Time (Response Time (
Response Time (Response Time (
Response Time (
Settling time withinSettling time within
Settling time withinSettling time within
Settling time within <1 second
±2% F.S. for 0-100% command step)±2% F.S. for 0-100% command step)
±2% F.S. for 0-100% command step)±2% F.S. for 0-100% command step)
±2% F.S. for 0-100% command step)
Zero StabilityZero Stability
Zero StabilityZero Stability
Zero Stability Dependent on Remote Pressure Transducer
Temperature CoefficientTemperature Coefficient
Temperature CoefficientTemperature Coefficient
Temperature Coefficient Dependent on Remote Pressure Transducer
Pressure CoefficientPressure Coefficient
Pressure CoefficientPressure Coefficient
Pressure Coefficient ±0.03% per psi (0-200 psi N2)
(Flow Measurement Only)(Flow Measurement Only)
(Flow Measurement Only)(Flow Measurement Only)
(Flow Measurement Only)
Attitude SensitivityAttitude Sensitivity
Attitude SensitivityAttitude Sensitivity
Attitude Sensitivity The accuracy of the Pressure Sensor is not attitude dependent
RatingsRatings
RatingsRatings
Ratings
Operating Temperature RangeOperating Temperature Range
Operating Temperature RangeOperating Temperature Range
Operating Temperature Range -14 to 65
o
C (7 to 149
o
F)
Transducer Pressure RatingsTransducer Pressure Ratings
Transducer Pressure RatingsTransducer Pressure Ratings
Transducer Pressure Ratings Dependent on Remote Pressure Transducer
Leak Integrity (external)Leak Integrity (external)
Leak Integrity (external)Leak Integrity (external)
Leak Integrity (external) 1x10
-9
atm. cc/sec He
MechanicalMechanical
MechanicalMechanical
Mechanical
Valve TypeValve Type
Valve TypeValve Type
Valve Type Normally Closed, Normally Open
Primary Wetted MaterialsPrimary Wetted Materials
Primary Wetted MaterialsPrimary Wetted Materials
Primary Wetted Materials 316L Stainless Steel, High Alloy Stainless Steel, Viton
®
fluoroelastomers.
Optional Buna-N, Kalrez
®
, Teflon
®
/Kalrez
®
, and EPDM
DiagnosticsDiagnostics
DiagnosticsDiagnostics
Diagnostics
Status LightsStatus Lights
Status LightsStatus Lights
Status Lights MFC Health, Network Status
Alarms*Alarms*
Alarms*Alarms*
Alarms*
Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic/Service PortDiagnostic/Service Port
Diagnostic/Service PortDiagnostic/Service Port
Diagnostic/Service Port
RS485 via 2.5 mm jack (Located under the top cover in SLAMf version)
SLA5840SLA5840
SLA5840SLA5840
SLA5840
1-4
Brooks
®
Model SLA5840
Section 1 Introduction
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Table 1-3 SLA5840 Series Communication Protocols
Communication ProtocolCommunication Protocol
Communication ProtocolCommunication Protocol
Communication Protocol
RS485RS485
RS485RS485
RS485
ProfibusProfibus
ProfibusProfibus
Profibus
®®
®®
®
DeviceNetDeviceNet
DeviceNetDeviceNet
DeviceNet
®®
®®
®
******
******
***
Electrical Connection (SLA58xx)Electrical Connection (SLA58xx)
Electrical Connection (SLA58xx)Electrical Connection (SLA58xx)
Electrical Connection (SLA58xx) 1 x 15-pin Male Sub-D, (A) 1 x 15-pin Male Sub-D 1 M12 with threaded
1 x 9-pin Female Sub-D coupling nut (B)
Electrical Connection (SLAMf)Electrical Connection (SLAMf)
Electrical Connection (SLAMf)Electrical Connection (SLAMf)
Electrical Connection (SLAMf) PG11 Cable Gland, 1/2” NPT (F) Conduit, M20 x 1.5 Conduit N/A
Analog I/OAnalog I/O
Analog I/OAnalog I/O
Analog I/O 0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA N/A
Power Max./PurgePower Max./Purge
Power Max./PurgePower Max./Purge
Power Max./Purge From +13.5 Vdc to +27 Vdc From +11 Vdc to +25 Vdc
Power Requirements Watts, Max.Power Requirements Watts, Max.
Power Requirements Watts, Max.Power Requirements Watts, Max.
Power Requirements Watts, Max. Valve Orifice > 0.032”: 8.7 Watts Valve Orifice > 0.032”: 10 Watts
Valve Orifice 0.032”: 5.2 Watts Valve Orifice 0.032”: 7 Watts
Without Valve: 2 Watts Without Valve: 4 Watts
Voltage Set Point Input SpecificationsVoltage Set Point Input Specifications
Voltage Set Point Input SpecificationsVoltage Set Point Input Specifications
Voltage Set Point Input Specifications
Nominal RangeNominal Range
Nominal RangeNominal Range
Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A
Full RangeFull Range
Full RangeFull Range
Full Range (-0.5)-11 Vdc N/A
Absolute Max.Absolute Max.
Absolute Max.Absolute Max.
Absolute Max. 18 V (without damage) N/A
Input ImpedenceInput Impedence
Input ImpedenceInput Impedence
Input Impedence >990 kOhms N/A
Current Set Point Input SpecificationsCurrent Set Point Input Specifications
Current Set Point Input SpecificationsCurrent Set Point Input Specifications
Current Set Point Input Specifications
Nominal RangeNominal Range
Nominal RangeNominal Range
Nominal Range 4-20 mA or 0-20 mA N/A
Full RangeFull Range
Full RangeFull Range
Full Range 0-22 mA N/A
Absolute Max.Absolute Max.
Absolute Max.Absolute Max.
Absolute Max. 24 mA (without damage) N/A
Input ImpedenceInput Impedence
Input ImpedenceInput Impedence
Input Impedence 100 Ohms N/A
Flow Output (Voltage) SpecificationsFlow Output (Voltage) Specifications
Flow Output (Voltage) Specifications
Flow Output (Voltage) Specifications
Flow Output (Voltage) Specifications
Nominal RangeNominal Range
Nominal RangeNominal Range
Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A
Full RangeFull Range
Full RangeFull Range
Full Range (-1)-11 Vdc N/A
Min Load ResistanceMin Load Resistance
Min Load ResistanceMin Load Resistance
Min Load Resistance 2 kOhms N/A
Flow Output (Current) SpecificationsFlow Output (Current) Specifications
Flow Output (Current) SpecificationsFlow Output (Current) Specifications
Flow Output (Current) Specifications
Nominal RangeNominal Range
Nominal RangeNominal Range
Nominal Range 0-20 mA or 4-20 mA N/A
Full RangeFull Range
Full RangeFull Range
Full Range 0-22 mA N/A
Max. LoadMax. Load
Max. LoadMax. Load
Max. Load 380 Ohms N/A
Analog I/O Alarm Ouput*Analog I/O Alarm Ouput*
Analog I/O Alarm Ouput*Analog I/O Alarm Ouput*
Analog I/O Alarm Ouput*
TypeType
TypeType
Type Open Collector N/A
Max. Closed (On) CurrentMax. Closed (On) Current
Max. Closed (On) CurrentMax. Closed (On) Current
Max. Closed (On) Current 25 mA N/A
Max. Open (Off) LeakageMax. Open (Off) Leakage
Max. Open (Off) LeakageMax. Open (Off) Leakage
Max. Open (Off) Leakage 1μA N/A
Max. Open (Off) VoltageMax. Open (Off) Voltage
Max. Open (Off) VoltageMax. Open (Off) Voltage
Max. Open (Off) Voltage 30 Vdc N/A
Analog I/O Valve Override Signal Specifications**Analog I/O Valve Override Signal Specifications**
Analog I/O Valve Override Signal Specifications**Analog I/O Valve Override Signal Specifications**
Analog I/O Valve Override Signal Specifications**
Floating/UnconnectedFloating/Unconnected
Floating/UnconnectedFloating/Unconnected
Floating/Unconnected Instrument controls valve to command set point N/A
VOR < 0.3 VdcVOR < 0.3 Vdc
VOR < 0.3 VdcVOR < 0.3 Vdc
VOR < 0.3 Vdc Valve Closed N/A
0.3 Vdc < VOR < 4.8 Vdc0.3 Vdc < VOR < 4.8 Vdc
0.3 Vdc < VOR < 4.8 Vdc0.3 Vdc < VOR < 4.8 Vdc
0.3 Vdc < VOR < 4.8 Vdc Undefined N/A
VOR > 4.8 VdcVOR > 4.8 Vdc
VOR > 4.8 VdcVOR > 4.8 Vdc
VOR > 4.8 Vdc Valve Open N/A
Input ImpedenceInput Impedence
Input Impedence
Input Impedence
Input Impedence 60 kOhms N/A
Absolute Max. InputAbsolute Max. Input
Absolute Max. InputAbsolute Max. Input
Absolute Max. Input (-25 Vdc) < VOR < 25 Vdc (without damage) N/A
*The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active.
The Alarm Output may be set to indicate any one of various alarm conditions.
** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the
valve based upon the measured reading as shown in this section.
*** Available on SLA5810/20/40 only.
Brooks
®
Model SLA5840
1-5
Section 1 IntroductionInstallation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Table 1-4 SLA58XX Series Certifications
Mark Agency Certification
Applicable
Standard Details
UL
(Recogonized)
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22
UL & CSA
Standards E73889 Vol 3, Sec 4
ATEX
II 3 G Ex nA IIC T4 Gc EN60079-0:2012
EN 60079-15:2010 KEMA 04ATEX 1118X
IECEx
II 3 G Ex nA IIC T4 Gc IEC 60079-0:2011
IEC 60079-15:2010 IECEx DEK 14.0072X
KOSHA Ex nA IIC T4
15-AV4BO-0641
15-AV4BO-0640
CE
EMC Directive 2014/30/EU
Directive 2011/65/EU
EN:61326-1:2013 EMC
RoHS
*ATEX/IECEx Special Conditions for safe use:
1. The module shall be installed in a suitable enclosure providing a degree of protection of
at least IP54 according to EN 60529 / IEC 60529, taking into account the environmental
conditions under which the equipment will be used.
2. When the temperature under rated condition exceeds 70 °C at the cable or conduit entry
point, or 80 °C at the branching point of the conductors, the temperature specification of
the selected cable shall be in compliance with the actual measured temperature values.
3. Provisions shall be made to prevent the rated voltage from being exceeded by transient
disturbances of more than 40%.
4. The equipment shall only be used in an area of not more than pollution degree 2, as
defined in IEC 60664-1.
1-6
Brooks
®
Model SLA5840
Section 1 Introduction
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Figure 1-1 SLA5840 Analog/RS485 Connections and Pinouts
RS485 Communications
The Brooks Digital Series is equipped with RS485 communication capability. Refer to Figure 1-2 (Analog I/O pin
connections), that enables the device to communicate via a personal computer for process control.
Baud rate selections for the Brooks Digital Series related to RS485 are: 1200, 2400, 4800, 9600, 19200 and 38400
baud and can be selected via the Brooks Expert Support Tool (BEST).
The RS485 is essentially a multidrop connection. It allows a maximum of 32 devices to be connected to a
computer system. IBM-compatible PC's are not equipped with RS485 ports as standard. An RS232/USB to RS485
converter or RS485 interface board is therefore required to connect an RS485 network to a standard PC. The
RS485 bus, a daisy chain network, meaning that the wires are connected at the units.
Note: Aux Input is used for Remote Transducer Pressure Controllers only.
Note: Aux Input is used for Remote Transducer Pressure Controllers only.
Brooks
®
Model SLA5840
1-7
Section 1 IntroductionInstallation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Figure 1-2 SLA5840 Profibus Connections and Pinouts
Profibus
®
Communications
The Brooks SLA5840 is now equipped to support the Profibus communication protocol. Profibus is a fieldbus-
based automation standard of Profibus and Profinet International (PI). Via a single bus cable, Profibus links
controller or control systems with decentralized field devices (sensors and actuators) on the field level and also
enables consistent data exchange with higher ranking communication systems. A 9-pin sub-D connector is
included on every device and is galvanic isolated from the main electronics as defined by the EN 50170 Profibus
standard to allow easy network connection separate from the main connector. The main 15-pin sub-D connector
or termination board is still needed for the power supply, but also allows for the standard analog I/O signals,
analog valve override, and (open-collector) alarm signaling to be used separate from the network connection.
The communication electronics allows for automatic baud rate detection ranging from 9600 baud to 12 Mbaud,
thus making the need for any hardware baud rate selection methods not required. For selecting the device
address, which must be unique on the network, two rotary switches are provided. This allows a user to easily
select any address number ranging from 0 to 126. This can provide fast device replacement without complex
network configurations. The Profibus-DP piggyback board is equipped with a zero command pushbutton, allowing
the user to give a manual command to the device to (re)balance the flow sensor electronics. This command can
also be issued through the protocol.
The Profibus-DP communication option supports the following message types:
Cyclic data exchange (Write/Read data).
Read inputs (e.g. status, flow, temperature, totalizer, etc.).
Read outputs (e.g. commands, setpoint).
Global control commands (e.g. fail safe, sync).
Get configuration (i.e. read number of I/O bytes and composition).
Read diagnostics information (i.e. get error and alarm status).
Set parameters (i.e. select gas number, engineering units, I/O configuration
Set parameters (i.e. select gas number, engineering units, I/O configuration etc.).
Check configuration (i.e. check I/O composition).
Note: Aux Input is used for
Remote Transducer Pressure
Controllers only.
1-8
Brooks
®
Model SLA5840
Section 1 Introduction
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
DeviceNet
TM
Communications
The Brooks SLA5840 is also available with DeviceNet
TM
communication capability. DeviceNet is an open digital
protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices
available on this popular networking standard, and is a member of ODVA
TM
(Open DeviceNet Vendors Association),
the governing standard body for DeviceNet.
DeviceNet
is similar to the RS485 standard in that it is a multi-drop connection that allows a maximum of 64 devices to
be connected on the same network. Baud rate selections for DeviceNet
products are 125K, 250K and 500K and can
be selected via MAC ID switches mounted on the device.
The DeviceNet
communication link also provides access to many of the Brooks SLA Digital Series functions for
“control and monitor” operations, including:
Accurate setpoint adjustment and flow output measurement (including units of measure selection)
PID Settings (controller only)
Valve Override (controller only)
Calibration Gas Select
Soft Start Control (controller only)
Figure 1-3 SLA5840 DeviceNet Connections and Pinouts
Note: Aux Input is used for Remote
Transducer Pressure Controllers only.
Brooks
®
Model SLA5840
1-9
Section 1 IntroductionInstallation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Figure 1-4 Model SLA5840, Thru-Flow, RS485
Figure 1-5 Model SLA5840, Thru-Flow, Profibus
1-10
Brooks
®
Model SLA5840
Section 1 Introduction
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
Figure 1-6 Model SLA5840, Thru-Flow, DeviceNet
2-1
Brooks
®
Model SLA5840
Section 2 Installation
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June 2016
2-1 General
This section provides installation instructions for the Brooks
®
SLA
Enhanced Remote Transducer Pressure Controller. Section 1, Figures 1-1
thru 1-6 show the dimensions and electrical connections.
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability.
A report should be submitted to your nearest Product Service Department.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: BrooksAm@BrooksInstrument.com
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel +81 (0) 3 5633 7100
6710 BK Ede, Netherlands Fax +81 (0) 3 5633 7101
Tel +31 (0) 318 549 300 Email: BrooksAs@BrooksInstrument.com
Fax +31 (0) 318 549 309
E-mail: BrooksEu@BrooksInstrument.com
Remove the envelope containing the packing list. Carefully remove the
instrument from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.
2-3 Recommended Storage Practice
If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following:
a. Within the original shipping container.
b. Stored in a sheltered area, preferably a dry, temperature controlled room.
c. 15°C (32°F) minimum, 35°C (149°F) maximum.
d. Relative humidity 45% nominal, 60% maximum, 25% minimum.
e. Upon removal from storage a visual inspection should be conducted to
verify the condition of equipment is "as received".
2-2
Brooks
®
Model SLA5840
Section 2 Installation
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
2-4 Return Shipment
Prior to returning any instrument to the factory, obtain a Return Materials
Authorization Number (RMA#). This can be obtained from the Brooks
Instrument website: www.BrooksInstrument.com
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: BrooksAm@BrooksInstrument.com
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel +81 (0) 3 5633 7100
6710 BK Ede, Netherlands Fax +81 (0) 3 5633 7101
Tel +31 (0) 318 549 300 Email: BrooksAs@BrooksInstrument.com
Fax +31 (0) 318 549 309
E-mail: BrooksEu@BrooksInstrument.com
All flow instruments returned to Brooks requires completion of Form
RPR003-1, Brooks Instrument Decontamination Statement, along with a
Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument.
Failure to provide this information will delay processing by Brooks
personnel. Copies of these forms can be downloaded from the Brooks
website www.BrooksInstrument.com or are available from any Brooks
Instrument location listed above.
2-5 Removal from Storage
Upon removal from storage, a visual inspection should be conducted to
verify the condition of the equipment is “as received.” If the equipment has
been in storage in conditions in excess of those recommended
(See Section 2-3), the device should be subjected to a pneumatic pressure
test in accordance with applicable vessel codes.
2-6 Gas Connections
Prior to installation ensure all piping is clean and free from obstructions.
Install piping in such a manner that permits easy access to the instrument
if removal becomes necessary.
2-3
Brooks
®
Model SLA5840
Section 2 Installation
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June 2016
2-7 Installation
Recommended installation procedures:
a. The SLA Enhanced RT should be located in a clean, dry atmosphere
relatively free from shock and vibration.
b. Leave sufficient room for access to Self-zero function push-button.
c. Install in such a manner that permits easy removal if the instrument
requires servicing.
d. The SLA Enhanced RT can be installed in any position. However,
mounting in orientations other than the original factory calibration
(see calibration data sheet supplied with the instrument) can result in a
±0.5% maximum full scale shift always re-zero following orientation
change and warmup.
e. When installing a mass flow controller or meter with full scale flow rates
of 10 slpm or greater, be aware that sharp, abrupt angles in the system
piping directly upstream of the controller may cause a small shift in
accuracy. If possible, have at least ten pipe diameters of straight tubing
upstream of the mass flow controller or meter. This is not required for
meters with an integrated filter.
2-4
Brooks
®
Model SLA5840
Section 2 Installation
Installation and Operation Manual
X-PR-SLA5840-Series-RevB-RT-eng
Part Number: 541B201AAG
June, 2016
2-8 In-Line Filter (See Table 2-1)
It is recommended that an in-line filter be installed upstream from the mass
flow controller or meter to prevent the possibility of any foreign material
entering the flow sensor or control valve. The filtering element should be
replaced periodically or ultrasonically cleaned.
2-9 Electrical Interface (Reference Figures 2-1 thru 2-4)
SLA Enhanced RT's are controlled using analog signals or digital control via
RS485, DeviceNet or Profibus. For an analog unit the minimum set of
connections which must be made to the pressure controller include: power
supply+ , supply common, setpoint, setpoint common, output signal and
output signal common. All signals are supplied via the 15-pin 'D' connector.
SLA Enhanced RT's electrical interface is designed to facilitate low-loss
and quiet signal connections. Separate returns (commons) are supplied for
the analog setpoint, analog flow signal, and the power supply. These
commons are electrically connected together on the PC board.
Voltage I/O Version
• Signal Common
• Signal Output
• +13.5 to +27 Vdc Supply
• Setpoint Input
• Setpoint Common
• Supply Common
For a DeviceNet unit, 11-25 Vdc power and communication I/O are
supplied via the standard 5-pin Circular Micro-Connector.
For a Profibus unit, the power and analog signals are via the 15-pin 'D'
connector. The Profibus communication signals are via the auxiliary 9-pin
'D' connector.
Refer to Figure 1-1 for analog/RS485 pin connections, Figure 1-2 for
Profibus pin connections and Figure 1-3 for DeviceNet pin connections.
Refer to Figures 2-2, 2-3 and 2-4 for typical electrical I/O configurations.
Models Maximum Flow Rate Recommended Filter
SLA5840 100 ccm 2 micron
SLA5840 500 ccm 5 micron
SLA5840 1 to 5 lpm 10 micron
SLA5840 10 to 100 lpm 40 micron
Table 2-1 Recommended Filter Size
  • Page 1 1
  • Page 2 2
  • Page 3 3
  • Page 4 4
  • Page 5 5
  • Page 6 6
  • Page 7 7
  • Page 8 8
  • Page 9 9
  • Page 10 10
  • Page 11 11
  • Page 12 12
  • Page 13 13
  • Page 14 14
  • Page 15 15
  • Page 16 16
  • Page 17 17
  • Page 18 18
  • Page 19 19
  • Page 20 20
  • Page 21 21
  • Page 22 22
  • Page 23 23
  • Page 24 24
  • Page 25 25
  • Page 26 26
  • Page 27 27
  • Page 28 28
  • Page 29 29
  • Page 30 30
  • Page 31 31
  • Page 32 32
  • Page 33 33
  • Page 34 34
  • Page 35 35
  • Page 36 36
  • Page 37 37
  • Page 38 38
  • Page 39 39
  • Page 40 40
  • Page 41 41
  • Page 42 42
  • Page 43 43
  • Page 44 44
  • Page 45 45
  • Page 46 46
  • Page 47 47
  • Page 48 48
  • Page 49 49
  • Page 50 50
  • Page 51 51
  • Page 52 52
  • Page 53 53
  • Page 54 54
  • Page 55 55
  • Page 56 56
  • Page 57 57
  • Page 58 58
  • Page 59 59
  • Page 60 60
  • Page 61 61
  • Page 62 62
  • Page 63 63
  • Page 64 64

Brooks SLA5840, Revision B Návod na používanie

Typ
Návod na používanie