Brooks 4850 / 4860 Návod na používanie

Installation and Operation Manual

X -TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

Brooks

®

48xx Series

Brooks

®

48xx Series

4850 Mass Flow Controller

4860 Mass Flow Meter

Model 4850/4860 with

Local Operator Interface

Model 4850/4860

with Compression Fittings

Installation and Operation Manual

X -TMF-4800-MFC-eng

Part Number:541B072AAG

October, 2017

Brooks

®

48xx Series

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

Installation and Operation Manual

X -TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

Brooks

®

48xx Series

Dear Customer,

We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their

gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for

various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,

analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover

of this manual or visit www.BrooksInstrument.com

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X -TMF-4800-MFC-eng

Part Number:541B072AAG

October, 2017

Brooks

®

48xx Series

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Contents

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

Paragraph Page

Number Number

Section 1 Introduction

1-1 How to Use This Manual ............................................................................................................1-1

1-2 Description .................................................................................................................................1-1

1-3 Specifications .............................................................................................................................1-1

1-4 Specifications for Local Operator Interface (LOI).......................................................................1-6

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ...............................................................................................2-1

2-4 Return Shipment ........................................................................................................................2-2

2-5 Transit Precaution ......................................................................................................................2-2

2-6 Removal from Storage ...............................................................................................................2-2

2-7 Mechanical Connections ............................................................................................................2-3

2-8 Electrical Connections................................................................................................................2-4

2-9 Operation Check Procedure.......................................................................................................2-5

Section 3 Operation

3-1 Operating Procedure..................................................................................................................3-1

3-2 Theory of Operation ...................................................................................................................3-1

3-3 Features .....................................................................................................................................3-2

3-4 Analog I/O Mode of Operation....................................................................................................3-2

3-5 PC-Based Support Tools............................................................................................................3-4

3-6 Local Operator Interface (LOI) ...................................................................................................3-4

Section 4 Maintenance and Troubleshooting

4-1 Overview ....................................................................................................................................4-1

4-2 Troubleshooting..........................................................................................................................4-2

4-2-1 Troubleshooting Table ................................................................................................................4-2

4-2-2 Frequently Asked Questions ......................................................................................................4-3

4-2-3 System Checks ..........................................................................................................................4-3

4-2-4 Calibration Procedure ................................................................................................................4-5

Section A Essential Instructions ............................................................................................................ A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

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Brooks

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48xx Series

Contents Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B0072AG

October, 2017

Figures

Figure Page

Number Number

1-1 Dimensions for Model 4850/4860 with Standard Process Connections .....................................1-4

1-2 Dimensions for Model 4850/4860 with Downport Connections ..................................................1-4

1-3 Dimensions for the 48xx Series Local Operator Interface (LOI) ................................................1-6

3-1 Gas Flow Across the MEMS Sensor ..........................................................................................3-1

4-1 Bench Troubleshooting Circuit ...................................................................................................4-5

Tables

Table Page

Number Number

1-1 48xx Series Specifications .........................................................................................................1-2

1-2 15-Pin D-Sub Connector Pin-out................................................................................................1-5

4-1 Troubleshooting..........................................................................................................................4-2

1-1

Brooks

®

48xx Series

Section 1 Introduction

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

1-1 How to Use This Manual

This instruction manual is intended to provide the user with all the

information necessary to install, operate and maintain the Brooks 48xx

Series Products.

This manual is organized into the following sections:

Section 1. Introduction

Section 2. Installation

Section 3. Operation

Section 4. Maintenance and Troubleshooting

Section A. Essential Instructions

Back Cover Warranty, Local Sales/Service Contact Information

1-2 Description

The Brooks 48xx Series Products are mass flow measurement devices

designed for accurately measuring (MFMs) and rapidly controlling (MFCs)

flows of gases. This instruction manual is intended to provide the user with

all the information necessary to install, operate and maintain the Brooks

Model 4850 mass flow controller(MFC) and 4860 mass flow meter (MFM).

1-3 Specifications for Meter/Controller

Do not operate on gases other than those listed in this

specification. Failure to heed this warning can result in serious

personal injury and/or damage to the equipment.

WARNING

!

1-2

Brooks

®

48xx Series

Section 1 Introduction

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

PP

P

erformanceerformance

erformance

Full Scale Flow RangeFull Scale Flow Range

Full Scale Flow Range 50 ml/min - 40 l/min

(50 sccm - 40 slpm)

(N

22

2

eq., at 0

o

C Ref, with typical 50 psid pressure differential)

ConCon

Con

trtr

tr

ol Rangeol Range

ol Range 2 - 100%

Flow Flow

Flow

AccurAccur

Accur

acyacy

acy +/- 3.0% of FS, +/- 1.0% FS optional

Flow RepeatabilityFlow Repeatability

Flow Repeatability +/- 0.15% of FS

Response Response

Response

TimeTime

Time Flow signal: <0.3 sec

Flow control: Settling time <0.75 sec from 0 to 100% FS (typical <0.5 sec for all steps)

TT

T

emperemper

emper

aturatur

atur

e Coefficiene Coefficien

e Coefficien

tt

t +/- 0.1% of FS/

o

C (N

22

2

)

RatingsRatings

Ratings

GasesGases

Gases Air, N

2

, O

2

, Ar, He, H

2

, CO

2

, CO, N

2

O, CH

4

, C

3

H

6

(Propene), C

3

H

8

(other gases upon request)

OperOper

Oper

ating Limitsating Limits

ating Limits Pressure 0 - 10 barg (0 - 150 psig)

Temperature 0 - 50

o

C

Humidity 5 to 95% R.H. (ambient)

DifferDiffer

Differ

enen

en

tial Prtial Pr

tial Pr

essuressur

essur

e Rangee Range

e Range Minimum: 0.35 bar (5 psid)

(Con(Con

(Con

trtr

tr

ollers)ollers)

ollers) Maximum: 10 bar (150 psid)

Leak InLeak In

Leak In

tegritytegrity

tegrity Inboard to Outboard: 1x10

-9

atm scc/sec Helium max.

MecMec

Mec

hanicalhanical

hanical

Materials of ConstructionMaterials of Construction

Materials of Construction Wetted parts: stainless steel, fluoroelastomers, silicon-based sensor

RoHSRoHS

RoHS Fully RoHS compliant per EU Directive 2011/65/EU

Outline DimensionsOutline Dimensions

Outline Dimensions Refer to Figures 1-1 & 1-2

PrPr

Pr

ocess Connectionsocess Connections

ocess Connections Inlet/Outlet threads: 9/16” - 18 UNF threads, Refer to Figure 6 for available process connections.

ElectricalElectrical

Electrical

Electrical ConnectionsElectrical Connections

Electrical Connections 15-pin D-sub connector

Analog/RS232: 15-pin D-sub connector

PP

P

ower Supply ower Supply

ower Supply

VV

V

oltage**oltage**

oltage** +15 Vdc + 10% or

+24 Vdc + 10%

Device only uses single sided power supply

Inrush current: < 1 A

PP

P

ower Requirower Requir

ower Requir

emenemen

emen

tsts

ts Model Device 15 Vdc 24 Vdc

Type Typical (mA) Max (mA) Typical (mA) Max (mA)

4850 Controller 130 160 150 200

4860 Meter 30 60 30 60

Analog Input/OutputAnalog Input/Output

Analog Input/Output 0-5 Vdc or 4-20 mA

Digital Input/OutputDigital Input/Output

Digital Input/Output RS232 (Standard with all analog I/O options)

VV

V

alve Override Signalalve Override Signal

alve Override Signal Valve Controller: Input Open

Valve Closed: <0.3 V; open valve: >4.8 V

** For high flows and/or low differential pressures (using orifices 0.049” (1.25mm) or 0.079” (2.0mm)) only 24 Vdc power is available.

Local OperLocal Oper

Local Oper

ator Inator In

ator In

terface (Lterface (L

terface (L

OI)OI)

OI)

DisplayDisplay

Display Effective display area: 28mm wide, 11mm high

Display Contents: 8x2 dot matrix display

OperOper

Oper

ating Limitsating Limits

ating Limits Temperature 0-50

o

C

Operating Humidity 5 to 95% R.H. (ambient)

Electrical ConnectionsElectrical Connections

Electrical Connections 2 15-pin D-sub connectors, one for the connection to the 48xx Series and one for the remote connection

PP

P

ower Supply ower Supply

ower Supply

VV

V

oltageoltage

oltage The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input

voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can

also be supplied by a remote connection via the D-connector.

Materials of ConstructionMaterials of Construction

Materials of Construction Enclosure: ABS plastic with CU-Ni plating

RoHSRoHS

RoHS Fully RoHS compliant per EU Directive 2011/65/EU.

Outline DimensionsOutline Dimensions

Outline Dimensions Refer to Figure 1-3

Table 1-1 48xx Series Specifications

Refer to Brooks document X-SE-4800-LOI-eng for complete instructions.

1-3

Brooks

®

48xx Series

Section 1 Introduction

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

These certifications cover the 48xx Series thermal mass flow devices as well as the Local Operator Interface (LOI).

Mark Agency Certification/ Marking/ Directive

Applicable

Standard Details

CSA

Class I, Div 2 Groups A, B, C & D; T4

Class 1, Zone 2, AEx nA II T4

Ex nA II T4

UL & CSA

Standards

Certificate No.

06.CSA150464

ATEX

II 3 G Ex nA II T4 EN60079-0:2006

EN 60079-15:2005

KEMA 06ATEX0251 X

CE

EMC Directive

2014/30/EU

EN:61326-1:2013 EMC

RoHS Directive

2011/65/EU

RoHS

Pressure Equipment Directive

2014/68/EU

Sound Engineering

Practice (SEP)

CSA Special Conditions for safe use:

1. The models are evaluated for an ambient temperature of 0°C to 50°C.

2. The module shall be installed in a suitable enclosure providing a degree of protection of

at least IP54 according to EN 60529, taking into account the environmental conditions

under which the equipment will be used.

ATEX Special Conditions for safe use:

1. The module shall be installed in a suitable enclosure in accordance with EN60079-15,

taking into account the environmental conditions under which the equipment will be used.

2. Provisions shall be made to prevent the rated voltage from being exceeded by transient

disturbances of more than 40%.

A review against the standards EN60079-0:2012, EN60079-15:2010, shows no significant

changes relevant to this equipment. Hence the standards EN 60079-0: 2006, EN 60079-15:

2005 continues to re

p

resent “State of the Art”

Hazardous Location Classification

The modules shall be installed in a suitable enclosure providing a degree of protection of at least IP54 according to

EN 60529, taking into account the environmental conditions under which the equipment will be used. Provisions

shall be made to prevent the rated voltage from being exceeded by transient disturbances of more than 40%.

1-4

Brooks

®

48xx Series

Section 1 Introduction

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

Figure 1-1 Dimensions for Model 4850/4860 with Standard Process Connections

Figure 1-2 Dimensions for Model 4850/4860 with Downport Connections

1-5

Brooks

®

48xx Series

Section 1 Introduction

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

Figure 1-3 Dimensions for the 48xx Series Local Operator Interface (LOI)

5850TR and S-Series pin-outs shown for reference only.

Table 1-2 15-Pin D-Sub Connector Pin-out

PIN # 4800 Series 5850TR S – SERIES (58xxS)

1 SETPOINT SIGNAL COMMON ANALOG COMMON SETPOINT SIGNAL COMMON

2 FLOW VOLTAGE OUTPUT FLOW VOLTAGE OUTPUT FLOW VOLTAGE OUTPUT

3 NOT USED NOT USED ALARM OUTPUT

4 FLOW CURRENT OUTPUT

FLOW CURRENT OUTPUT FLOW CURRENT OUTPUT

5 POSITIVE SUPPLY VOLTAGE

POSITIVE SUPPLY VOLTAGE POSITIVE SUPPLY VOLTAGE

6 NOT USED NOT USED NEGATIVE SUPPLY VOLTAGE

7 SETPOINT CURRENT INPUT SETPOINT CURRENT INPUT SETPOINT CURRENT INPUT

8 SETPOINT VOLTAGE INPUT SETPOINT VOLTAGE INPUT SETPOINT VOLTAGE INPUT

9 POWER SUPPLY COMMON POWER SUPPLY COMMON POWER SUPPLY COMMON

10 FLOW SIGNAL COMMON

FLOW SIGNAL COMMON FLOW SIGNAL COMMON

11 NOT USED

5V REFERENCE 5V REFERENCE

12 VALVE OVERRIDE INPUT VALVE OVERRIDE INPUT VALVE OVERRIDE INPUT

13 NOT USED NOT USED NOT USED

14 RXD NOT USED RXD / A-

15 TXD NOT USED TXD / A+

1-6

Brooks

®

48xx Series

Section 1 Introduction

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

THIS PAGE WAS

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2-1

Brooks

®

48xx Series

Section 2 Installation

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

2-1 General

This section contains the procedures for the receipt and installation of the

instrument. See Section 1 for dimensional and connection requirements.

Do not attempt to start the system until the instrument has been

permanently installed. It is important that the start-up procedures be

followed in the exact sequence presented.

2-2 Receipt of Equipment

When the equipment is received, the outside packing case should be

checked for damage incurred during shipment. If the packing case is

damaged, the local carrier should be notified at once regarding his liability.

A report should be submitted to the nearest Brooks Instrument location

listed on the Global Service Network page on our website:

BrooksInstrument.com/GlobalSupportCenters

Remove the envelope containing the packing list. Carefully remove the

instrument from the packing case. Make sure spare parts are not discarded

with the packing materials. Inspect for damaged or missing parts.

2-3 Recommended Storage Practice

If intermediate or long-term storage of equipment is required, it is

recommended that the equipment be stored in accordance with the

following conditions:

a. Within the original shipping container.

b. Stored in a sheltered area, preferably a warm, dry, heated warehouse.

c. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,

7°C (45°F) minimum.

d. Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-2

Brooks

®

48xx Series

Section 2 Installation

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

2-4 Return Shipment

Prior to returning any instrument to the factory for any reason, visit our

website for instructions on how to obtain a Return Materials Authorization

Number (RMA #) and complete a Decontamination Statement to

accompany it: BrooksInstrument.com/Service. All instruments returned to

Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s)

used in the instrument. Failure to provide this information will delay

processing of the instrument.

Instrument must have been purged in accordance with the following:

2-5 Transit Precautions

To safeguard the instrument against transportation damage, it is

recommended to keep the instrument in its factory container until ready for

installation.

2-6 Removal from Storage

Upon removal of the instrument from storage, a visual inspection should be

conducted to verify its "as-received" condition. If the instrument has been

subject to storage conditions in excess of those recommended (See

Section 2-3), it should be subjected to a pneumatic pressure test in

accordance with applicable vessel codes.

2-3

Brooks

®

48xx Series

Section 2 Installation

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

2-7 Mechanical Connections

If mechanical connections were ordered from Brooks Instrument, an

integrated filter of 40 microns is already installed in the upstream fitting.

This is to prevent the possibility of any foreign material entering the flow

sensor or control valve (for MFC).

If the 48xx Series product was ordered without fittings, there is no internal

filter in the device. In this case, it is recommended that an in-line filter rated

to at least 40 microns be installed upstream from the device.

Recommended installation procedures:

a. The Brooks MFC or MFM should be located in a clean,

dry atmosphere relatively free from shock and vibration.

b. Install in such a manner that permits easy removal if the instrument

requires servicing.

c. The Brooks MFC or MFM can be installed in any position.

However, mounting in orientations other than the original factory

calibration (see calibration data sheet supplied with the instrument) can

result in a <±0.2% maximum full scale shift after re-zeroing.

d. When installing a mass flow controller or meter with full scale flow rates

of 10 ln/min (10 slpm) or greater, be aware that sharp, abrupt angles in

the system piping directly upstream of the controller may cause a small

shift in accuracy. If possible, have at least ten pipe diameters of straight

tubing upstream of the mass flow controller or meter. This is not

required for meters with an integrated inlet filter.

2-4

Brooks

®

48xx Series

Section 2 Installation

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

2-8 Electrical Connections

The setpoint signal is supplied as a 0 to 5 Vdc or 4 to 20 mA analog signal.

All signals are supplied via the 15-pin D-Connector. There is also an

optional local operator interface (LOI). When the LOI is used the setpoint

signal is provided by the LOI.

The Brooks electrical interface is designed to facilitate low-loss, quiet

signal connections. Separate returns (commons) are supplied for the

analog setpoint, analog flow signal, and the power supply. These commons

are electrically connected together on the PC board.

2-5

Brooks

®

48xx Series

Section 2 Installation

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

Analog I/O Versions

• Signal Common

• Signal Output (Voltage or Current)

• Nominal +15 Vdc or +24 Vdc

• Setpoint Input (Voltage or Current)

• Setpoint Common

• Supply Common

• Chassis Ground (via unit body)

Refer to Table 1-1 for pin connections

Local Operator Interface (LOI) Versions

For description and specifications for the local operator interface refer to

Section 1-4 in this manual and the Brooks document

X-SE-4800-LOI-eng

2-9 Operation Check Procedure

a. Mount the MFC/MFM in its final orientation.

b. Apply power to the MFC/MFM and allow approximately 15 minutes for

the instrument to completely warm up and stabilize its temperature.

c. Do NOT supply gas to the MFC/MFM. Ensure that the differential

pressure across the MFC/MFM is zero.

d. Apply a setpoint (MFC only) of:

0.000 Vdc ± 10 mV (0 - 5 Vdc setpoint)

4.000 mA ± 32 μA (4 - 20 mA setpoint)

e. If the zero exceeds one of these limits, follow the re-zeroing procedure

in Section 3. The analog output signal should be:

0.000 Vdc ± 10 mV (0 - 5 Vdc output)

4.000 mA ± 32 μA (4 - 20 mA output)

f. Turn on the gas supply. A positive flow signal may be present due to

slight valve leak-thru (MFC only).

g. Supply a setpoint signal between:

0 to 5 Vdc (0 - 5 Vdc setpoint)

4 to 20 mA (4 - 20 mA setpoint)

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Brooks

®

48xx Series

Section 2 Installation

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

h. Check the analog output signal. The output signal should match the

setpoint signal in accordance with the accuracy specifications provided

in Section 1 of this document.

i. If flow output signal does not match the setpoint, and pressure settings

are correct, this could indicate a problem in the MFC. A secondary issue

could be the gas type. When checking with a surrogate gas, ensure that

there is enough pressure to the MFC in order to flow the correct amount

of the surrogate gas.

3-1

Brooks

®

48xx Series

Section 3 Operation

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

3-1 Operating Procedure

After the MFC/MFM has been properly installed in the process, it is ready

for operation. When initiating flow, slowly open the valve to avoid a flow

surge. Bypass is a help in bringing the flow on smoothly. Avoid starting a

pump to supply the flowmeter without the use of a valve upstream of the

flowmeter.

3-2 Theory of Operation

As with traditional Thermal Mass Flow devices, the 48xx Series flow

measurement system consists of two components: the flow restrictor and

the sensor. The purpose of the 48xx Series flow restrictor is to create

backpressure and force flow through the thermal sensor. Figure 3-1 is a

cross sectional cut-away view depicting gas flow around the thermal

sensor.

Figure 3-1 Gas Flow Across the MEMS Sensor

The 48xx Series sensor is a Micro Electro Mechanical Systems (MEMS)

based thermal sensor. As shown in Figure 3-1, the gas flows directly

across the MEMS sensor, resulting in extremely fast response times. As

with traditional thermal mass flow sensors, upstream and downstream

temperature sensors are centered around a heating element. As gas flows

across the upstream temperature sensor towards the heater and the

downstream temperature sensor, it cools the upstream temperature sensor

and heats the downstream temperature sensor. This causes the

3-2

Brooks

®

48xx Series

Section 3 Operation

Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B072AAG

October, 2017

temperature difference measured by the two temperature sensors to

increase with increasing flow. The temperature difference is then converted

into a flow signal based on the factory calibration.

There is one major difference between a traditional thermal mass flow

sensor and the MEMS based sensor. A traditional thermal mass flow

sensor makes use of a Cp transfer function. However, as depicted in

Figure 3-1, only a portion of the flow field is heated by the MEMS sensor.

Therefore, a Cp transfer function cannot be used in the MEMS sensor to

adjust the flow rate for a gas other than what the device was calibrated on

when it left the factory.

3-3 Features

Note: All Brooks Series mass flow meters are configured at the

factory according to customer order and do not require adjustment.

Not all features are available on all instruments.

The Brooks 48xx Series device is a full-featured digital MFC. The device

performs much like a traditional analog MFC, but with improved step

response and valve control. The analog interface matches that of Brooks'

popular analog MFCs so it can be retrofitted into tools using analog MFCs.

3-4 Analog I/O Mode of Operation

The following paragraphs describe the basic features of the Brooks 4800

Series instruments.

Functional Description

The analog interface may include any of the following I/O options as

specified by the user:

0 - 5 Vdc setpoint, 0 - 5 Vdc flow output

4 - 20 mA setpoint, 4 - 20 mA flow output

Also included is the Valve Override input pin. All analog signals available

are on the 15 pin D-Connector. (See Fig. 1-1 for connections.)

Before operating the MFC/MFM, apply power and warm-up the instrument

for approximately 15 minutes. After warm-up, apply gas pressure then

proceed by following the instructions in the following sections.

Setpoint Signal Input (MFC Only)

This input allows the user to establish the MFC setpoint. Several input

types are available as follows:

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